Granted Patent
Utility
US 6,271,149 · App. 09/531,549
Method of forming a thin film on a substrate of a semiconductor device
Inventors:
Masataka Kondo, Katsuhiko Hayashi, Eiji Kuribe
Patented Case
View Patent ↗
Granted: Aug 7, 2001
Filed: Mar 20, 2000
Inventors
Masataka Kondo
Katsuhiko Hayashi
Eiji Kuribe
Assignee (at issue)
KANEKA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.