Granted Patent
Utility
US 6,272,907 · App. 09/234,177
Integrated silicon profilometer and AFM head
Inventors:
Armand P. Neukermans, Timothy G. Slater
Patented Case
View Patent ↗
Granted: Aug 14, 2001
Filed: Jan 19, 1999
Inventors
Armand P. Neukermans
Timothy G. Slater
Assignee (at issue)
XROS, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.