Granted Patent
Utility
US 6,277,501 · App. 09/230,684
Silicon epitaxial wafer and method for manufacturing the same
Inventor:
Takashi Fujikawa
Patented Case
View Patent ↗
Granted: Aug 21, 2001
Filed: Jan 29, 1999
Inventor
Takashi Fujikawa
Assignee (at issue)
SUMITOMO METAL INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.