Granted Patent
Utility
US 6,281,033 · App. 09/471,712
Semiconductor dynamic quantity-sensor and method of manufacturing the same
Inventors:
Katsumichi Uayanagi, Mitsuo Sasaki, Mutsuo Nishikawa, Shiho Katsumi
Patented Case
View Patent ↗
Granted: Aug 28, 2001
Filed: Dec 23, 1999
Inventors
Katsumichi Uayanagi
Mitsuo Sasaki
Mutsuo Nishikawa
Shiho Katsumi
Assignee (at issue)
FUJI ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.