Granted Patent
Utility
US 6,281,084 · App. 09/386,832
Disposable spacers for improved array gapfill in high density DRAMs
Inventors:
Hiroyuki Akatsu, Ramachandra Divakaruni, Gill Yong Lee
Patented Case
View Patent ↗
Granted: Aug 28, 2001
Filed: Aug 31, 1999
Inventors
Hiroyuki Akatsu
Ramachandra Divakaruni
Gill Yong Lee
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
Infineon Technologies North America Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.