Granted Patent
Utility
US 6,281,098 · App. 09/334,166
Process for Polycrystalline film silicon growth
Inventors:
Tihu Wang, Theodore F. Ciszek
Patented Case
View Patent ↗
Granted: Aug 28, 2001
Filed: Jun 15, 1999
Inventors
Tihu Wang
Theodore F. Ciszek
Assignee (at issue)
Midwest Research Institute, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.