Granted Patent
Utility
US 6,281,125 · App. 09/573,034
Methods for preparing ruthenium oxide films
Inventors:
Brian A. Vaartstra, Eugene P. Marsh
Patented Case
View Patent ↗
Granted: Aug 28, 2001
Filed: May 17, 2000
Inventors
Brian A. Vaartstra
Eugene P. Marsh
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.