Granted Patent
Utility
US 6,281,469 · App. 09/360,247
Capacitively coupled RF-plasma reactor
Inventors:
Jerome Perrin, Mustapha Elyaakoubi, Jacques Schmitt
Patented Case
View Patent ↗
Granted: Aug 28, 2001
Filed: Jul 23, 1999
Inventors
Jerome Perrin
Mustapha Elyaakoubi
Jacques Schmitt
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.