Granted Patent
Utility
US 6,281,496 · App. 09/360,775
Observing/forming method with focused ion beam and apparatus therefor
Inventors:
Kazuo Aita, Yasuhiko Sugiyama
Patented Case
View Patent ↗
Granted: Aug 28, 2001
Filed: Jul 26, 1999
Inventors
Kazuo Aita
Yasuhiko Sugiyama
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.