IP Library Granted Patent US 6,281,513
Granted Patent Utility
US 6,281,513 · App. 09/327,468

Pattern forming method

Inventor: Hiroshi Takenaka
Patented Case View Patent ↗
Granted: Aug 28, 2001 Filed: Jun 8, 1999
Inventor
Hiroshi Takenaka
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 6,281,513
App. No.
09/327,468
Filed
1999-06-08
Granted
2001-08-28
Kind
A