Granted Patent
Utility
US 6,283,827 · App. 09/247,107
Non-contacting support for a wafer
Inventors:
Michael Vogtmann, Terry L. Lentz
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Feb 9, 1999
Inventors
Michael Vogtmann
Terry L. Lentz
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.