Granted Patent
Utility
US 6,283,836 · App. 09/264,067
Non-abrasive conditioning for polishing pads
Inventors:
Clinton O. Fruitman, Mark Meloni, John Natalicio
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Mar 8, 1999
Inventors
Clinton O. Fruitman
Mark Meloni
John Natalicio
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.