Granted Patent
Utility
US 6,284,052 · App. 09/136,881
In-situ method of cleaning a metal-organic chemical vapor deposition chamber
Inventors:
Tue Nguyen, Lawrence J. Charneski
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Aug 19, 1998
Inventors
Tue Nguyen
Lawrence J. Charneski
Assignees (at issue)
Sharp Laboratories of America, Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.