Granted Patent
Utility
US 6,284,055 · App. 09/614,502
Method and apparatus for immersion treatment of semiconductor and other devices
Inventors:
Paul William Dryer, Richard Scott Tirendi, James Bradley Sundin
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Jul 11, 2000
Inventors
Paul William Dryer
Richard Scott Tirendi
James Bradley Sundin
Assignee (at issue)
Z Cap, L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.