Granted Patent
Utility
US 6,284,111 · App. 09/459,805
Sputtering target free of surface-deformed layers
Inventors:
Hideyuki Takahashi, Tateo Ohhashi, Kazuhiro Seki
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Dec 13, 1999
Inventors
Hideyuki Takahashi
Tateo Ohhashi
Kazuhiro Seki
Assignee (at issue)
Nikko-Materials Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.