Granted Patent
Utility
US 6,284,151 · App. 08/997,289
Chemical mechanical polishing slurry for tungsten
Inventors:
Timothy C. Krywanczyk, Lawrence D. David
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Dec 23, 1997
Inventors
Timothy C. Krywanczyk
Lawrence D. David
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.