Granted Patent
Utility
US 6,284,316 · App. 09/489,187
Chemical vapor deposition of titanium
Inventors:
Gurtej S. Sandhu, Donald L. Westmoreland
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Jan 20, 2000
Inventors
Gurtej S. Sandhu
Donald L. Westmoreland
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.