IP Library › Granted Patent US 6,284,384
Granted Patent Utility
US 6,284,384 · App. 09/250,908

Epitaxial silicon wafer with intrinsic gettering

Inventors: Gregory M. Wilson, Jon Rossi, Charles C. Yang
Patented Case View Patent ↗
Granted: Sep 4, 2001 Filed: Feb 16, 1999
Inventors
Gregory M. Wilson
Jon Rossi
Charles C. Yang
Assignee (at issue)
MEMC Electronic Materials, Inc.

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Quick Facts
Patent No.
US 6,284,384
App. No.
09/250,908
Filed
1999-02-16
Granted
2001-09-04
Kind
A