Granted Patent
Utility
US 6,284,417 · App. 09/651,392
Reticle cleaning without damaging pellicle
Inventor:
Matthew E. Williams
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Aug 29, 2000
Inventor
Matthew E. Williams
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.