Granted Patent
Utility
US 6,284,641 · App. 09/174,300
Method of forming a contact using a sacrificial spacer
Inventor:
Kunal R. Parekh
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Oct 16, 1998
Inventor
Kunal R. Parekh
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.