Granted Patent
Utility
US 6,284,677 · App. 08/868,752
Method of forming fluorosilicate glass (FSG) layers with moisture-resistant capability
Inventors:
Chih-Hsiang Hsiao, Chih-Ching Hsu
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Jun 5, 1997
Inventors
Chih-Hsiang Hsiao
Chih-Ching Hsu
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.