Granted Patent
Utility
US 6,285,199 · App. 09/229,991
Device and method for optimally detecting a surface condition of wafers
Inventor:
Tae-Kye Kim
Patented Case
View Patent ↗
Granted: Sep 4, 2001
Filed: Jan 14, 1999
Inventor
Tae-Kye Kim
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.