Granted Patent
Utility
US 6,286,525 · App. 09/071,683
Substrate cleaning apparatus and method
Inventors:
Joichi Nishimura, Akihiko Morita, Masami Ohtani
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: May 1, 1998
Inventors
Joichi Nishimura
Akihiko Morita
Masami Ohtani
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.