Granted Patent
Utility
US 6,286,688 · App. 08/825,883
Compliant silicon wafer handling system
Inventors:
Victor Mimken, Tom Krawzak
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: Apr 2, 1997
Inventors
Victor Mimken
Tom Krawzak
Assignee (at issue)
SCP Global Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.