Granted Patent
Utility
US 6,287,880 · App. 09/751,728
Method and apparatus for high resolution profiling in semiconductor structures
Inventors:
Andrew Norman Erickson, Peter De Wolf
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: Dec 29, 2000
Inventors
Andrew Norman Erickson
Peter De Wolf
Assignee (at issue)
Veeco Instruments Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.