Granted Patent
Utility
US 6,287,948 · App. 09/558,530
Semiconductor device and method for making pattern data
Inventor:
Fumiaki Ushiyama
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: Apr 26, 2000
Inventor
Fumiaki Ushiyama
Assignee (at issue)
SEIKO EPSON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.