Granted Patent
Utility
US 6,287,975 · App. 09/009,369
Method for using a hard mask for critical dimension growth containment
Inventors:
Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: Jan 20, 1998
Inventors
Stephen P. DeOrnellas
Leslie G. Jerde
Alferd Cofer
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.