Granted Patent
Utility
US 6,287,976 · App. 09/315,122
Plasma processing methods and apparatus
Inventors:
Oleg Siniaguine, Igor Bagriy
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: May 19, 1999
Inventors
Oleg Siniaguine
Igor Bagriy
Assignee (at issue)
Tru-Si Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.