IP Library › Granted Patent US 6,287,978
Granted Patent Utility
US 6,287,978 · App. 09/344,277

Method of etching a substrate

Inventors: David S. Becker, Guy T. Blalock, Fred L. Roe
Patented Case View Patent ↗
Granted: Sep 11, 2001 Filed: Jun 30, 1999
Inventors
David S. Becker
Guy T. Blalock
Fred L. Roe
Assignee (at issue)
Micron Technology, Inc.

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,287,978
App. No.
09/344,277
Filed
1999-06-30
Granted
2001-09-11
Kind
A