Granted Patent
Utility
US 6,288,558 · App. 09/504,409
Method for probing semiconductor devices for active measuring of electrical characteristics
Inventors:
Gunnar Zimmermann, Mark Johnston
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: Feb 15, 2000
Inventors
Gunnar Zimmermann
Mark Johnston
Assignees (at issue)
Infineon Technologies AG
White Oak Semiconductor Partnership
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.