Granted Patent
Utility
US 6,289,030 · App. 09/015,010
Fabrication of semiconductor devices
Inventor:
Paul Marshall Charles
Patented Case
View Patent ↗
Granted: Sep 11, 2001
Filed: Jan 28, 1998
Inventor
Paul Marshall Charles
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.