Granted Patent
Utility
US 6,290,491 · App. 09/607,155
Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber
Inventors:
Iraj Shahvandi, Oliver Vatel, Peggy John
Patented Case
View Patent ↗
Granted: Sep 18, 2001
Filed: Jun 29, 2000
Inventors
Iraj Shahvandi
Oliver Vatel
Peggy John
Assignees (at issue)
Motorola, Inc.
Semiconductor 300 GmbH & Co. KG
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.