Granted Patent
Utility
US 6,290,859 · App. 09/439,103
Tungsten coating for improved wear resistance and reliability of microelectromechanical devices
Inventors:
James G. Fleming, Seethambal S. Mani, Jeffry J. Sniegowski, Robert S. Blewer
Patented Case
View Patent ↗
Granted: Sep 18, 2001
Filed: Nov 12, 1999
Inventors
James G. Fleming
Seethambal S. Mani
Jeffry J. Sniegowski
Robert S. Blewer
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.