Granted Patent
Utility
US 6,293,139 · App. 09/432,928
Method of determining performance characteristics of polishing pads
Inventors:
Kevin Keller, Gerald A. Whitman, Jr.
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: Nov 3, 1999
Inventors
Kevin Keller
Gerald A. Whitman, Jr.
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.