Granted Patent
Utility
US 6,293,222 · App. 09/311,931
Remote-plasma-CVD method for coating or for treating large-surface substrates and apparatus for performing same
Inventor:
Volker Paquet
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: May 14, 1999
Inventor
Volker Paquet
Assignee (at issue)
Schott Glaswerke
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.