Granted Patent
Utility
US 6,293,291 · App. 09/289,491
Method and apparatus for the treatment of objects, preferably wafers
Inventors:
Hans-Peter Sperlich, Volker Gajewski
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: Apr 9, 1999
Inventors
Hans-Peter Sperlich
Volker Gajewski
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.