Granted Patent
Utility
US 6,293,749 · App. 09/193,991
Substrate transfer system for semiconductor processing equipment
Inventors:
Ivo Raaijmakers, Loren Jacobs, Michael Halpin, James A. Alexander, Ken O'Neill, Dennis L. Goodwin
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: Nov 17, 1998
Inventors
Ivo Raaijmakers
Loren Jacobs
Michael Halpin
James A. Alexander
Ken O'Neill
Dennis L. Goodwin
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.