Granted Patent
Utility
US 6,294,024 · App. 09/175,287
Electrostatic chucks and a particle deposition apparatus therefor
Inventors:
Hoi-Cheong Steve Sun, Timothy Allen Pletcher
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: Oct 20, 1998
Inventors
Hoi-Cheong Steve Sun
Timothy Allen Pletcher
Assignee (at issue)
Delsys Pharmaceutical Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.