Granted Patent
Utility
US 6,294,026 · App. 08/756,670
Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loops
Inventors:
Klaus Roithner, Bernhard Poschenrieder, Karl Paul Muller
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: Nov 26, 1996
Inventors
Klaus Roithner
Bernhard Poschenrieder
Karl Paul Muller
Assignees (at issue)
Siemens Aktiengesellschaft
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.