Granted Patent
Utility
US 6,294,909 · App. 08/488,380
Electro-magnetic lithographic alignment method
Inventor:
Glenn J. Leedy
Patented Case
View Patent ↗
Granted: Sep 25, 2001
Filed: Jun 7, 1995
Inventor
Glenn J. Leedy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.