Granted Patent
Utility
US 6,299,462 · App. 09/842,293
Self positioning, passive MEMS mirror structures
Inventor:
David K. Biegelsen
Patented Case
View Patent ↗
Granted: Oct 9, 2001
Filed: Apr 25, 2001
Inventor
David K. Biegelsen
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.