Granted Patent
Utility
US 6,300,202 · App. 09/574,732
Selective removal of a metal oxide dielectric
Inventors:
Christopher C. Hobbs, Rama I. Hegde, Phillip J. Tobin
Patented Case
View Patent ↗
Granted: Oct 9, 2001
Filed: May 18, 2000
Inventors
Christopher C. Hobbs
Rama I. Hegde
Phillip J. Tobin
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.