Granted Patent
Utility
US 6,300,206 · App. 09/486,899
Method for manufacturing semiconductor device
Inventors:
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiroshi Momiji, Hiromi Abe, Masayuki Suzuki
Patented Case
View Patent ↗
Granted: Oct 9, 2001
Filed: Mar 3, 2000
Inventors
Shinichi Fukada
Naotaka Hashimoto
Masanori Kojima
Hiroshi Momiji
Hiromi Abe
Masayuki Suzuki
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.