Granted Patent
Utility
US 6,300,208 · App. 09/505,264
Methods for annealing an integrated device using a radiant energy absorber layer
Inventors:
Somit Talwar, Gaurav Verma
Patented Case
View Patent ↗
Granted: Oct 9, 2001
Filed: Feb 16, 2000
Inventors
Somit Talwar
Gaurav Verma
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.