Granted Patent
Utility
US 6,300,600 · App. 09/373,894
Hot wall rapid thermal processor
Inventors:
Christopher Ratliff, Taiqing Qiu, Jeff Kowalski, Morteza Yadollahi, Saeed Sedehi
Patented Case
View Patent ↗
Granted: Oct 9, 2001
Filed: Aug 12, 1999
Inventors
Christopher Ratliff
Taiqing Qiu
Jeff Kowalski
Morteza Yadollahi
Saeed Sedehi
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.