IP Library Granted Patent US 6,300,628
Granted Patent Utility
US 6,300,628 · App. 09/207,823

Focused ion beam machining method and device thereof

Inventors: Toshiaki Fujii, Yasuhiko Sugiyama, Toshio Doi
Patented Case View Patent ↗
Granted: Oct 9, 2001 Filed: Dec 9, 1998
Inventors
Toshiaki Fujii
Yasuhiko Sugiyama
Toshio Doi
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,300,628
App. No.
09/207,823
Filed
1998-12-09
Granted
2001-10-09
Kind
A