Granted Patent
Utility
US 6,300,667 · App. 09/137,772
Semiconductor structure with air gaps formed between metal leads
Inventor:
Yasushi Miyamoto
Patented Case
View Patent ↗
Granted: Oct 9, 2001
Filed: Aug 25, 1998
Inventor
Yasushi Miyamoto
Assignee (at issue)
NIPPON STEEL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.