IP Library Granted Patent US 6,301,284
Granted Patent Utility
US 6,301,284 · App. 09/241,240

Narrow band UV laser with visible light guide laser

Inventor: Peter Clarke Newman
Patented Case View Patent ↗
Granted: Oct 9, 2001 Filed: Feb 1, 1999
Inventor
Peter Clarke Newman
Assignee (at issue)
Cymer, LLC

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Quick Facts
Patent No.
US 6,301,284
App. No.
09/241,240
Filed
1999-02-01
Granted
2001-10-09
Kind
A