Granted Patent
Utility
US 6,306,313 · App. 09/497,982
Selective etching of thin films
Inventors:
Linus Albert Fetter, John Pastalan
Patented Case
View Patent ↗
Granted: Oct 23, 2001
Filed: Feb 4, 2000
Inventors
Linus Albert Fetter
John Pastalan
Assignee (at issue)
Agere Systems Guardian Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.