Granted Patent
Utility
US 6,307,635 · App. 09/176,617
Phase-shifting point diffraction interferometer mask designs
Inventor:
Kenneth Alan Goldberg
Patented Case
View Patent ↗
Granted: Oct 23, 2001
Filed: Oct 21, 1998
Inventor
Kenneth Alan Goldberg
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.